ELECTRICAL BIAS POWER SUPPLIES:
PSG/L-EB (Ref.No. VMPS-E-003L)
PSG/plc-EB (Ref.No. VMPS-E-003P)



PSG/L-EB



PSG/plc-EB

These electrical bias power supplies are intended to provide the electrical bias voltage to different types of technological objects used in thin film deposition and cleaning processes in vacuum (substrates. targets, tooling, etc,).

Analogues: Advanced Energy (USA) and ELAN (Germany) power supplies.

Power supply PSG/L-EB has two operation modes: autonomous by front control panel with three 3.5 signs digital displays, and remote by analog (+0 ... 10 V)/digital (0/24 V) interface.

Power supply PSG/plc-EB has also two operation modes: autonomous by front control panel with double-line 16 signs digital display, and remote by analog (+0 ... 10 V)/digital( 0/24 V) interface and by serial port RS232/RS485.

Options:

  • volt-addition power supply up to 200 W;
  • *extra fast (< 3 µs) arc suppression switch;
  • bipolar pulse output voltage switch-former.

When ordering please do not forget to specify the required power - 1.5, 3, or 6 kW.

SPECIFICATIONS

Open-circuit voltage, V, no less than 300/600/1200
Output power, kW 1.5/3/6
Output parameters (voltage, current, power) non-stability, %, no more than 1
Output voltage ripple, %, no more than 1
Output parameters steady-time, s, no more 1.5
Arc or overload suppressing time, µs, no more than 10
Independent interlock inputs 0/24 V 5
Efficiency, no less than 0.85
Input power 3 phases 50/60Hz, AC voltage on request
Overall dimensions, mm 19", 4HU, 458x177x489