COATING MACHINE Model CVP-700
(Ref.No. VVCC-700)


High vacuum system for hard, decorative, protective, wear-resistive, antifriction and functional coating deposition by unbalanced magnetron sputtering with ion-beam assistance. Intended for production of:


There is a wide selection of metal, metal nitride, oxide, and oxinitride coatings of different color and saturation as well as colorless without affecting the workpiece color. The worcpieces (substrates) are placed on easy removable carriers installed on the vertical drum rotating in vacuum chamber around the linear ion-beam source, two heaters, and two unbalanced magnetrons. Ion beam source is used both for workpieces ion-beam cleaning and for ion-beam assisted deposition. The planetary rotating of installed workpieces is provided.



SPECIFICATIONS

Vacuum chamber dimensions, mm Dia.730x760
Drum diameter, mm 500
Rotating parts max. diameter, mm 150
Numbers of carriers per drum 12
Ultimate vacuum, torr 2x10-5
Number of ion sources 1
Ion source:
- Voltage, V
- Current, A

2000
2
Number of unbalanced magnetrons 2
Magnetron dimensions, mm 650x150
Magnetron max. power, kW 40
Number of infrared substrates heaters 2
Infrared heater power, kW 6
Substrate bias:
- Voltage, V
- Current, A

0 - 300
5
Number of gas supply channels 2 - 3
Power consumption, kW 40
Water flow at pressure of 4 - 6 atm
-cold(5oC - 25oC), m3/h
-hot (40oC - 60oC), m3/h

4
3
Compressed air pressure, bar 4 - 6
Occupied floor space, m2 16
Weight, kg 1500

Coating Machine CVPT-800