UNIFIED GAS FLOW AND PRESSURE CONTROLLER GSC-4/1
(Ref.No. VGSC-041)

Gas flow and pressure controller is intended to supply the working gases (2 - 4 channels) to vacuum chamber and for the total pressure control. The MKS or RRG-9 flow controllers are used to control the flow of gases. The conductance controller with pneumatic driver based on width-pulse modulation is used to control the total pressure. The system is designed on the base of OMRON (Japan), MKS (France) and Festo (Germany) components.
Controller has two operation modes: autonomous - semi-automatic by front control panel, and remote by analog (+0 ... 10 V)/digital (0/24 V) interface.
Options: (i) from 2 to 4 gas flow channels; (ii) with or without total pressure control.

SPECIFICATIONS

Number of gas flow channels	2-4
Gas flow control range (depends on flow controller type), l/h	0.9-1800
Gas flow control error, %, no more than	±1
Gas flow control response time, s, no more than	3
Number of total pressure control channels	0-3
Pressure control range, torr	10-4 - 10-1
Pressure control error, %, no more than	±3
Pressure control response time, s, no more than	5
Number of independent interlocks inputs 0/24 V	3
Overall dimensions, mm	4U, 19", 450x177x320
Weight, kg, no more than	7