ION SOURCES POWER SUPPLIES:
PSG/L-IS (Ref.No. VMPS-I-009L)
PSG/plc-IS (Ref.No. VMPS-I-009P)




PSG/L-IS



PSG/plc-IS

These power supplies are intended to power ion sources, mainly End Hall ion accelerators with anodic layer. The provide stabilized and controlled voltage, current or power. Power supplies are produced with output power 3, 6 or 9 kW. Applications: ion beam sputtering coatings deposition, ion beam cleaning, ion etching, ion beam assisted coatings deposition.

Analogues: Spellman (USA) power supplies.

Power supply PSG/L-IS has two operation modes: autonomous by front control panel with three 3.5 signs digital display, and remote by analog (+0 ... 10 V)/digital (0/24 V) interface.

Power supply PSG/plc-IS also has two operation modes: autonomous by front control panel with double-line 16 signs digital display, and remote by analog (+0 ... 10 V)/digital (0/24 V) interface and by serial port RS232/RS485.

Options: - cathode-compensator power supply up to 200 W.

When ordering please do not forget to specify the required power - 3, 6, or 9 kW.

SPECIFICATIONS

Open-circuit voltage, V, no less than 4000
Output power, kW 3/6/9
Output parameters (voltage, current, power) non-stability, %, no more than 1
Output voltage ripple, %, no more than 3
Output parameters steady-time, s, no more 1.5
Arc or overload suppressing time, µs, no more than 10
Independent interlock inputs 0/24 V 5
Efficiency, no less than 0.85<
Input power 3 phases 50/60Hz, AC voltage on request
Overall dimensions, mm 19", 4HU, 458x177x489