MAGNETRONS POWER SUPPLIES:
PSG/L-MS (Ref.No. VMPS-M-012L)
PSG/plc-MS (Ref.No. VMPS-M-012P)




PSG/L-MS



PSG/plc-MS

These power supplies are intended to power DC sputtering magnetrons with controlled voltage, current or power from 6 to 12 kW. Applications: magnetron sputtering thin film deposition in vacuum.

Analogues: Magnetrons power supplies MDXII-15K Advanced Energy (USA) and DCS-55 ELAN (Germany).

Power supply PSG/L-MS has two operation modes: autonomous by front control panel with three 3.5 signs digital displays, and remote by analog(+0 ... 10 V)/digital(0/24 V) interface.

Power supply PSG/plc-MS has two operation modes: autonomous by front control panel with double-line 16 signs digital display, and remote by analog (+0 ... 10 V)/digital (0/24 V) interface and by serial port RS232/RS485.

Options:

  • volt-addition power supply up to 200 W;
  • *extra fast (< 3 µs) arc suppression switch;
  • bipolar pulse output voltage switch-former.

When ordering please do not forget to specify the required power - 6, 9, or 12 kW.

SPECIFICATIONS

Open-circuit voltage, V, no less than 1000
Output power, kW 6/9/12
Output parameters (voltage, current, power) non-stability, %, no more than 1
Output voltage ripple, %, no more than 10
Output parameters steady-time, s, no more 1.5
Arc or overload suppressing time, µs, no more than (3*)10
Independent interlock inputs 0/24 V 5
Efficiency, no less than 0.85
Input power 3 phases 50/60Hz, AC voltage on request
Overall dimensions, mm 19", 4HU, 458x177x489

Unified DC magnetrons power supplies with output power 18 and 24 kW. Fast arc suppresion.