MAGNETRONS POWER SUPPLIES:
Models MESH-MS-..../1000 Unified Line of Magnetron Power Supplies
| Model | Ref. No | Max.power, kW |
| MESH-MS-8/1000 | VMPS-M-008 | 4 |
| MESH-MS-12/1000 | VMPS-M-012 | 6 |
| MESH-MS-24/1000 | VMPS-M-024 | 12 |
| MESH-MS-50/1000 | VMPS-M-050 | 24 |
| MESH-MS-100/1000 | VMPS-M-100 | 50 |
These drivers are intended
to power DC sputtering magnetrons with power
from 4 to 50 kW. The functional analogues are MDX-10K Series of Advanced Energy,
USA and DCS-55 Series of ELAN (Electronische Anlagen GmbH, Germany. Also they
may be used as high current sources of electric bias voltage in various
technological plasma processing (ion bombardment, ion implantation, heating,
etc.).
The drivers provide precise wide-range control of output parameters
(current, voltage, power) by built-in tunable Pl-regulator. They have optimal
for magnetron operation Volt-Ampere characteristics providing easy ignition
and stable magnetron discharge as well as effective short-circuits and overload
protection.
Each driver operates in two modes: independent mode (removable panel
with 3-channel digital display) and remote control (digital 0/24 V and
analog 0...10 V connection to an external computer).
The driver set includes 1-2 unified units (Converter and Rectifier),
remote transformer unit, connecting cables.
On customer request the drivers may be supplied with different
Volt-Ampere characteristics, galvanic decoupling of "+" and "-" outputs
relatively ground, and with the switchboard to provide work with more than
one magnetron.
When ordering please do not forget to specify the required power.
SPECIFICATIONS
| Open-circuit voltage, V, no less than | 1000 |
| Operating current, A MESH-MS-8/1000 MESH-MS-12/1000 MESH-MS-24/1000 MESH-MS-50/1000 MESH-MS-100/1000 |
0.2 ... 8 0.5 ... 12 1 ... 24 2 ... 50 5 ... 100 |
| Current/power control non-stability, %, no more than | <0.7 |
| Output voltage ripple, %, no more than | 10 |
| Output parameters steady-time, s, no more | 0.2 |
| Independent interlock inputs 0/24 V | 5 |
| Efficiency, no less than | 0.85 |
| Input power | 3 phases 50/60Hz, AC voltage on request |
| Overall dimensions (1 - 2 units), mm | 19", 4U, 482x175x482 |
