DC AND MF MAGNETRONS FOR COATINGS DEPOSITION

We supply a wide range of developed and successfully used in industry DC and MF magnetron sputtering systems, both balanced and unbalanced, intended for metal and dielectric hard, wear-resistance, corrosion resistance, decorative, functional coatings deposition on metal, glass, ceramic, porcelain, faience, plastic surfaces.

Magnetrons may work both in DC and middle frecuency (up to 70 kHz) polar and bi-polar modes without modification. They have a low working gas pressure and may work together with ion beam sources for ion beam assisted coating deposition.

Our DC and MF magnetron sputtering systems allow coating deposition on parts with dimensions from a few square centimeters to a few square meters. Depending on material to be sputtered and technological run requirements we offer two kinds of linear sputtering systems - plane and cylindrical. In both cases the zone of target erosion is distributed along a target surface - plane or cylindrical one.

To increase a production rate the double-side magnetrons (plane and cylindrical) and "magnetron plates" have been developed.

"Magnetron plate" in in-line coating machine	Double-side magnetrons

The special device - triangle plane magnetron is intended for optical coatings deposition on rotating plane, spherical, or planetary substrates holder.

On customer request magnetron's magnetic system may be optimized to provide increased target utilization rate or allow magnetic materials sputtering.

Magnetrons with the length from about 300 mm up to 2400 mm are available.

Magnetrons may be manufactured either for installation inside a vacuum chamber volume, or with a flange for flange mounting.

Magnetrons may be designed and manufactured for customer specified targets, both bonded and un-bonded.

Magnetrons may be delivered with suitable power supplies and gas flow controllers (see Power Supplies and Controllers, Monitors pages), plasma optical monitors, and other components on request.

We can upgrade with these devices practically any suitable vacuum chamber!

These are the base samples of magnetron sputtering systems produced by our suppliers. All systems are presented in standard configuration and may be manufactured in accordance with customer specifications. To meet all your needs you have to specify your requirements in this form. Click on a picture to open detailed specifications.

Planar magnetron	Optimized planar magnetron	Unbalanced planar magnetron	Planar magnetron with adjustable balance	Double-side planar magnetron
Magnetron for ferro-magnetic targets	Cylindrical magnetron	Unbalanced cylindrical magnetron	Double-side cylindrical magnetron	Triangle planar magnetron