COATING MACHINE Model MESH-10
(Ref.No. VMCC-010)

High vacuum system for decorative, protective, hard and functional coating deposition by magnetron sputtering with ion-beam assistance. Intended for production of hard coatings on tools, heating elements with insulation layer interlaced in between them, corrosion and wear-resistive protective coatings to replace conventional electroplated ones, decorative "gold" coatings on the glass, metals, ceramics, porcelain, faience, plastics. There is a wide selection of metal, metal nitride, oxide, and oxinitride coatings of different color and saturation as well as colorless without affecting the workpiece color. The vacuum chamber consists of three horizontal sections. The right section may be moved allowing to load/unload workpieces on the cart 1. There are two magnetrons 2 and one ion beam source 3 installed in the central section.The pumping system including pumps 4, 5, 6 is installed in the left section.Cart 1 with loaded workpieces scans magnetrons and ion sources during the deposition process. Ion-beam source and magnetrons may work as together, as separately depending on technological process. Control cabinet 8 and magnetron power supplies 7 are used to control technological process.

SPECIFICATIONS

Cart dimensions, mm	900x1500
Max. workpiece height, mm	300
Pumping duration, min	25
Ion beam cleaning and coating deposition duration, min	15 - 35
Ultimate vacuum, torr, no more<	2x10-5
Pumping control	Manual and automatic
Technological process control	Manual with automatic end-point control
Number of ion sources	1
Number of magnetrons	2
Number of process gas flow controllers, manual or automatic on request	4
Power consumption, kW<	40
>Water flow at pressure of 4 - 6 atm -cold(+5oC - +25oC), m3/h -hot (+40oC - +60oC), m3/h	2 0.3
Overall dimensions, mm	6800x2900x22200
Weight, kg, no more	4000