COATING MACHINE Model MESH-20
(Ref.No. VMCC-020)
High vacuum system for decorative, protective, and functional coating
deposition by magnetron sputtering with ion-beam assistance. Intended for
production of corrosion and wear-resistive protective coatings replacing the
electroplated ones, decorative "gold" coatings on the glass, metals, ceramics,
porcelain, faience, plastics. There is a wide selection of metal, metal nitride,
oxide, and oxinitride coatings of different color and saturation as well as
colorless without affecting the workpiece color. The worcpieces (substrates) are
placed on easy removable carriers installed on the vertical drum rotating in
vacuum chamber around the linear ion-beam source and magnetrons. Ion beam
source is used both for parts ion-beam cleaning and for ion-beam assisted
deposition. The system has plasma spectra optical monitoring.
SPECIFICATIONS
| >Dimensions of workpiece carriers, mm | 700x250 |
| Number of carriers per drum | |
| Max. workpiece thickness, mm | 50 |
| Pumping duration, min | 12 |
| Ion beam cleaning and coating deposition duration, min | 10 - 60 |
| Ultimate vacuum, torr, no more | 2x10-5 |
| Pumping control | Automatic |
| Technological process control | Semi-automatic |
| Number of ion sources | 1 |
| Number of magnetrons | 2 |
| Number of process gas flow controllers, manual or automatic on request | 1 - 4 |
| Power consumption, kW | 40 |
| Water flow at pressure of 4 - 6 atm -cold(+5oC - +25oC), m3/h -hot (+40oC - +60oC), m3/h |
0.3 0.1 |
| Compressed air pressure, MPa | 5 - 6 |
| Overall dimensions, mm | 2500x4000x2300 |
