High vacuum system for hard, decorative, protective, and functional
coating deposition by magnetron sputtering with ion-beam assistance. Intended
for production of hard coatings on tools, corrosion and wear-resistive
protective coatings replacing the electroplated ones, decorative "gold" coatings
on the glass, metals, ceramics, porcelain, faience, plastics. There is a wide
selection of metal, metal nitride, oxide, and oxinitride coatings of different
color and saturation as well as colorless without affecting the workpiece
color. The substrates are placed on easy removable carriers
installed on the vertical drum rotating in vacuum chamber around the linear
ion-beam source and magnetron. Ion beam source is used both for parts ion-beam
cleaning and for ion-beam assisted deposition. The system is computer controlled.
SPECIFICATIONS
| Dimensions of workpiece carriers, mm | 700x180 |
| Number of carriers per drum | 10 |
| Max. workpiece thickness, mm> | 50 |
| Pumping duration, min | 10 |
| Ion beam cleaning and coating deposition duration, min | 10 - 60 |
| Ultimate vacuum, torr, no more | 2x10-5 |
| Pumping control | Automatic |
| Technological process control | Automatic |
| Number of ion sources | 1 |
| Number of magnetrons | 1 |
| Number of process gas flow controllers | 3 |
| Power consumption, kW | 20 |
| Water flow at pressure of 4 - 6 atm -cold (+5oC - +25oC), m3/h -hot (+40oC - +60oC), m3/h |
1 0.1 |
| Overall dimensions, mm | 2100x3800x2000 |
| Weight, kg, no more | 2500 |