COATING MACHINE Model MESH-31.4
(Ref.No. VMCC-031)

High vacuum system for hard, decorative, protective, and functional coating deposition by magnetron sputtering with ion-beam assistance. Intended for production of hard coatings on tools and cutters, corrosion and wear-resistive protective coatings replacing the electroplated ones, car mirrors coatings including the colored and antiglared ones, decorative "gold" and others coatings on the glass, metals, ceramics, porcelain, faience, plastics. There is a wide selection of metal, metal nitride, oxide, and oxinitride coatings of different color and saturation as well as colorless without affecting the workpiece color. The workpieces (substrates) are placed on easy removable carriers installed on the vertical drum rotating in vacuum chamber around the linear ion-beam source and magnetron. Ion beam source is used both for parts ion-beam cleaning and for ion-beam assisted deposition. The system is ready to include the full automatic control by PLC-controller.

Model MESH 31.4 is improved by comparison with previous Models 31.1 - 31.3. The Inficon^TM vacuum controller is installed, magnetron targets utilization rates are significally increased. Now the working gases are supplied separately to each magnetron and ion source. The magnetrons and inside-chamber tooling design are also improved. As a result the addditional arc evaporating system may be installed in the same volume.

SPECIFICATIONS

Dimensions of workpiece carriers, mm *	600x150
Number of carriers per drum *	12
Pumping duration, min	10
Ion beam cleaning and coating deposition duration, min	30
Ultimate vacuum, torr, no more	2x10-5
Pumping control	Automatic
Technological process control	Automatic
Number of ion sources (2 kW)	1
Number of magnetrons (15 kW each)	2
Number of process gas flow controllers (automatic)	3
Power consumption, kW	45
Water flow at pressure of 4 - 6 atm -cold (+5oC - +25oC), m3/h -hot (+40oC - +60oC), m3/h	0.3 0.1
Overall dimensions, mm	2500x4000x2300

^* - on customer request