High vacuum system for decorative, protective and functional coating deposition by
magnetron sputtering with ion-beam assistance. Intended for production of car mirrors including the colored and
antiglared ones, heating elements with insulation layer between them, corrosion and wear-resistive protective coatings
replacing the electroplated ones, decorative "gold" coatings on the glass, metals, ceramics, porcelain,
faience, plastics. There is a wide selection of metal, metal nitride, oxide, and oxinitride coatings of different
color and saturation as well as colorless without affecting the workpiece color. The worcpieces (substrates) are
placed on easy removable carriers installed on the vertical drum rotating in vacuum chamber around the linear ion-beam
source and magnetron. Ion beam source is used both for parts ion-beam cleaning and for ion-beam assisted deposition.
SPECIFICATIONS
| Dimensions of workpiece carriers, mm | 600x150 |
| Number of carriers per drum | 12 |
| Max. workpiece thickness, mm | 50 |
| Pumping duration, min | 10 |
| Ion beam cleaning and coating deposition duration, min | 10 - 60 |
| Ultimate vacuum, torr, no more than | 2x10-5 |
| Pumping control | Automatic |
| Technological process control | Semi-automatic |
| Number of ion sources | 1 |
| Number of magnetrons | 1 |
| Number of process gas flow controllers, manual or automatic on request | 3 |
| Power consumption, kW | 20 |
| Water flow at pressure of 4 - 6 atm -cold (+5oC ... +25oC), m3/h -hot (+40oC ... +60oC), m3/h |
0.3 0.1 |
| Overall dimensions, mm | 2500x4000x2300 |