RATISTM - 2D and 3D Plane-Parallel Scanning Stages
 |
RATISTM - the scanning stages basic models with 2D and 3D sample displacement. Scanning stages are made of solid metal bar processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. RATISTM design provides excellent linearuty and flatness of movement, in contrast to the classical scanners bazed on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength comparing with fragile piezoelectric tubes. |
|
| RATISTM multi-axis scanners are equipped with capacitive displacement sensors for digital feedback loop.
It provides high movement accuracy and linearity and eliminates the creep effect of piezoceramics. Capasitance measurements are made
with TDC (Time-To-Digital Conversion) chips located to sensors as close as possible. Such a design leads to the low noise and high speed
displacement control. To control RATISTM scanning stages universal controller EG-3000TM and NSpecTM software are used. RATISTM stages are applicable for use in the fields of scanning probe microscopy, positioning, metrology, biology research, microelectronics, micromanipulation, etc. |
||
SPECIFICATIONS
| Parameter | RATIS X10Y10TM | RATIS X15Y15TM | RATIS X10Y10Z25TM | RATIS X15Y15Z25TM |
| XY range, mcm | 100 x 100 | 150 x 150 | 100 x 100 | 150 x 150 |
| Z range, mcm | - | - | 25 | 25 |
| Resonant frequency XY, kHz | 1 | 1 | 1 | 1 |
| Resonant frequency Z, kHz | 0 | 3 | 0 | 3 |
| Minimal scan step, nm | 0.1 | |||
| Angle tilting over the full range | 0.01o | |||
| Maximal scanning speed, Hz (line/sec) | 10 | |||
| Maximal sample weight, g | 100 | |||
Click on the picture below to see magnified drawing:
Contact us for more detailed information!
Download RATISTM stages Datasheet
VECOR 101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466, Fax: +1-949-451-6813, info@vecorus.com