Power Supplies
We offer a series of budgetary low cost unified power supplies to drive DC sputtering magnetrons, End Hall, close drift,
and anode layer ion sources. All power supplies provide stabilized output voltage, current, and power, automatic arc
supression, and are insensitive to short-cirquit load. They are controlled via front panel controls and also may be
built in OEM automatic system via RS232/RS485 interface.
Power supplies may work in parallel to increase the power. In that case an extra connector is installed to provide communication between the units.
Built-in gas flow control is also available as an option.
Our power supplies are succesfully working in various coating machines in Japan, China, Russia, S.Korea, USA and other countries.
Please see the power supplies main specifications below.
Contact us if you need power supplies to meet your special requirements.
Click on the pictures below to magnify them.
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| 12 kW DC magnetron power supply | 6 kW DC magnetron and anode layer ion source power supply |
DC Magnetron Power Supplies
| Model | Average voltage, V, max |
Average current, A, max |
Power, kW, max |
Overall dimensions, mm |
Weight, kg |
| MPS 2.5/2PC | 950 | 2.5 | 2 | 19", 2U 235x141x490 |
10 |
| MPS 10/6PC | 600 | 10 | 6 | 19", 2U 235x141x490 |
12 |
| MPS 15/12PC | 800 | 15 | 12 | 19", 3U 445x141x490 |
24 |
| MPS 30/12PC | 400 | 30 | 12 | 19", 3U 445x141x490 |
24 |
- Single polar pulsed output voltage:
- Pulse frequency 132 kHz
- Average output voltage stabilization in the range from 10% to 100%
- Stabilized output voltage setting step 1 V
- Average output current stabilization in the range from 10% to 100%
- Stabilized output current setting step 10 mA
- Output power stabilization in the range from 10% to 100%
- Stabilized output power setting step 10 W
- Automatic arc supression, insensitivity to short-circuit load
- Ignition voltage 1800 V
- Manual control via front panel
- Working parameters and modes indication on the front panel display
- Output voltage ON/OFF remote control
- RS232/RS485 interface for communication with remote computer or OEM automatic control system
- Power 220/208 VAC, 45-65 Hz
- Air cooling
DC Dual Magnetron Power Supplies
| Model | Voltage, V, max |
Current, A, max |
Power, kW, max |
Overall dimensions, mm |
Weight, kg |
| MPS 1.2/5AC | 1200 | 5 | 6 | 19", 2U 235x141x490 |
10 |
| MPS 1.2/10AC | 1200 | 10 | 12 | 19", 3U 445x141x490 |
12 |
- AC output voltage:
- Output voltage frequency 66 kHz
- Open circuit output voltage 1200 V
- Output voltage stabilization in the range from 10% to 100%
- Stabilized output voltage setting step 1 V
- Output current stabilization in the range from 10% to 100%
- Stabilized output current setting step 10 mA
- Output power stabilization in the range from 10% to 100%
- Stabilized output power setting step 10 W
- Automatic arc supression, insensitivity to short-circuit load
- Manual control via front panel
- Working parameters and modes indication on the front panel display
- Output voltage ON/OFF remote control
- RS232/RS485 interface for communication with remote computer or OEM automatic control system
- Power 220/208 VAC, 45-65 Hz
- Air cooling
Anodic Layer Ion Sources Power Supplies
| Model | Voltage, V, max |
Current, A, max |
Power, kW, max |
Overall dimensions, mm |
Weight, kg |
| PS 3/3DC | 3000 | 1 | 3 | 19", 2U 235x141x490 |
10 |
| PS 3.5/3DC | 3500 | 1 | 3 | 19", 2U 235x141x490 |
10 |
| PS 3/6DC | 3000 | 2 | 6 | 19", 2U 235x141x490 |
12 |
- DC output voltage:
- Output voltage stabilization in the range from 20% to 100%
- Stabilized output voltage setting step 10 V
- Output current stabilization in the range from 10% to 100%
- Stabilized output current setting step 10 mA
- Output power stabilization in the range from 20% to 100%
- Stabilized output power setting step 10 W
- Automatic arc supression, insensitivity to short-circuit load
- Manual control via front panel
- Working parameters and modes indication on the front panel display
- Output voltage ON/OFF remote control
- RS232/RS485 interface for communication with remote computer or OEM automatic control system
- Power 220/208 VAC, 45-65 Hz
- Air cooling
End Hall and Close Drift Ion Sources Power Supplies
| Model | Voltage, V, max |
Current, A, max |
Power, kW, max |
Overall dimensions, mm |
Weight, kg |
| IPS3500.2 | 350 | 10 | 3.5 | 19", 3U 454x141x490 |
20 |
- Two output channels - anode and cathode filament
- Anode output channel:
- DC output voltage
- CLC filter to supress unwonted plasma oscillations
- Stabilized output voltage +20...+350 V
- Stabilized output voltage control step 1.0 V
- Stabilized output current 1...10 A
- Stabilized output current control step 100 mA
- Stabilized output power 200...3000 W
- Stabilized output power control step 1.0 W
- Open circuit voltage no less than 700 V
- Output parameters ramp time control range 0...200 s
- Channel turning on delay control range 0...200 s
- Preset parameters stabilization accuracy 2%
- Cathode filament output channel:
- AC output voltage (1000 Hz)
- Two switchable outputs to power two cathode filaments
- Output voltage 0...20 V
- Output voltage control step 1.0 V
- Output current 1...30 A
- Output current control step 0.1 A
- Output power 100...600 W
- Output power control step 1.0 W
- Output parameters ramp time control range 0 ... 200 s
- Preset parameters stabilization accuracy 2%
- Automatic arc supression, insensitivity to short-circuit load
- Manual control via front panel
- Working parameters and modes indication on the front panel display
- Output voltage ON/OFF remote control
- RS232/RS485 interface for communication with remote computer or OEM automatic control system
- Power 3x220/208 VAC, 4 kW, 45-65 Hz
- Air cooling
Download Power Supply IS3500.2 brochure
 We are sorry, this page is still under construction! Please visit us later to see more power supplies. If you need detailed information or looking for some special power supplies, please contact us directly. Thanks for your patience! |
VECOR 101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466, Fax: +1-949-451-6813, info@vecorus.com