POWER SUPPLIES

All systems are presented in standard configuration and may be manufactured in accordance with customer specifications. Move mouse on a picture to see a short model description. Click on a picture to open detailed specifications.

Magnetrons Power Supplies

Unified DC magnetrons power supplies with output power from 6 to 12 kW. Fast arc suppresion.

PSG/L-MS
(6 - 12 kW)

 Unified DC magnetrons power supplies with output power from 6 to 12 kW. Fast arc suppresion.

PSG/plc-MS
(6 - 12 kW)

 Unified DC magnetrons power supplies with output power 18 and 24 kW. Fast arc suppresion.

PSG/L-MS
(18 kW)

Unified DC magnetrons power supplies with output power 18 and 24 kW. Fast arc suppresion.

PSG/plc-MS
(24 kW)

 Unified line of DC magnetrons power supplies with output power from 4 to 50 kW. Fast arc suppresion.

MESH-MS

Ion Sources Power Supplies

Unified ion sources power supplies with output power from 3 to 9 kW.

PSG/plc-IS
(3 - 9 kW)

 Unified ion sources power supplies with output power from 3 to 9 kW.

PSG/L-IS
(3 - 9 kW)

Bias Power Supplies

Unified electrical bias power supplies with output power from 1.5 to 6 kW. Fast arc suppresion.

PSG/L-EB
(1.5 - 6 kW)

 Unified electrical bias power supplies with output power from 1.5 to 6 kW. Fast arc suppresion.

PSG/plc-EB
(1.5 - 6 kW)