UNIFIED PUMPING CONTROLLER VSC-3/1 (Ref.No. VVSC-031)

Pumping controller is intended to control the single-chamber vacuum system pumping process from atmosphere pressure to ultimate high vacuum.
Controller has four operating modes: autonomous, semi-automatic, remote, by PLC controller, and the following working modes:

• OFF - Turn off all devices;
• STOP - Diffusion pump is backing and cooling down before to turn on the OFF mode;
• PRE VACUUM - Automatic rough pumping and saving rough vacuum in the chamber;
• HI VACUUM - Automatic high vacuum pumping the chamber down;
• RELOAD - Automatic venting the chamber to atmosphere pressure.

SPECIFICATIONS

Output voltages supplied to devices to be controlled*, V Vacuum meters Electro-pneumatic valves Leak valve, LN2 supplier Mechanical pumps, diffusion pump	220 AC, 50 Hz 0/24 0/24 3x380 AC, 50 Hz
Input signals from controlled devices*, V Vacuum meters (interlocks outputs) Valves, mechanical pumps, diffusion pump Diffusion pump heater neutral*	24/0 0/24 - 0/127
Non-stop working time, h	24
Main power*, V	3x380, 50/60 Hz
Overall dimensions, mm	4U, 19"
Weight, kg, no more than	17

^* - on customer request